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CMP Conditioners

Business Units
Electronics & Semiconductor
Types of tools
Grinding Tools
Processing method
Grinding
Work
Semiconductor materials, Nonferrous and specialty metals, Composite materials and resins
Bond
Electroplated

Product Details

High-quality, high-reliability pad conditioners to meet diverse needs

In the manufacturing process of semiconductor devices and wafers, the demand for planarization is increasing year by year as wiring becomes finer and more multilayered. In the CMP process, which is used as a planarization technology, the conditioning of polishing pads plays an important role in stabilizing polishing characteristics, and we have been providing high-quality, highly reliable conditioners for over 25 years.We continue to contribute to the stabilization of the CMP process, offering conditioners in a variety of shapes and specifications to meet diverse needs.

Application

  • Conditioning of polishing pads

Bond Type

  • Electroplated

Product characteristics

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